Companies like InvenSense of Santa Clara have devoted themselves entirely to fabricating dual-axis gyroscopes that integrate with handheld devices in order to give them that special something.InvenSense’s gyroscopes don’t just end up in your palm pilot, however.

They’ve also been used for years in places like video game controllers, where a good gyroscope can give the player more natural control—this is what made the Wii so revolutionary, and it continues to sweep the industry as more and more video game companies switch to controllers that operate based on players’ body movements. Microscopic MEMS technology made that possible.

Digital cameras can also benefit from MEMS gyroscope integration; it allows the camera to sense when it is being turned in order to modify the screen from a landscape to a portrait layout. Motion-sensing MEMS technology is equally well suited to the development of applications like the face-location or smile-location device. The MEMS sensor implanted in these cameras makes it possible for them to perform “smart” functions and will probably lead to the integration of digital cameras with touch-screen devices at some point in the near future.

InvenSense has almost reached their personal goal of establishing an inertial measurement unit, otherwise known as an IMU, which will need only a single chip to function. It is anticipated that this IMU will engender the next generation of consumer electronics; they will be packed full of rich features, graphics, and sound; and thanks to refined MEMS technology they will also have advanced motion-sensing capabilities that allow even the vibrations of a human voice to trigger their performance. As they seek to mass-manufacture MEMS gyroscopes and single-chip IMUs, InvenSense expects to reach a point where they can market these sensitive devices for less than a dollar per axis.

This would make it much more attractive for electronics manufacturers to regularly incorporate motion-sensing technology into their handheld devices and would thereby render them much more common in everyday life. Soon, MEMS gyroscopes and their motion-sensor counterparts will be the standard by which we judge handheld consumer electronics, not the high-end exception as they currently seem to be.

Researchers, investors, and manufacturers can all see the way the market is going. InvenSense has protected its personal MEMS designs with no less than 12 patents that cover everything from wafer integration to packaging. This only goes to show how seriously MEMS technology could impact the economy if handled correctly.

Advertisers and marketing agents stand to gain an equally large share from the burgeoning nanotechnology field and its sister enterprises; if the cash flow that attended the iPhone’s debut is any indication, public reception of even better “smart” devices will be overwhelming.

InvenSense is working to make that dream a reality with their patented manufacturing system, which integrates two very low-cost X-axis and Y-axis MEMS gyroscopes in order to not only simplify but also reduce costs associated with the production process typically needed for gyroscopes of any kind.

They can combine these gyroscopes on a single chip, making it easier for the main electronics manufacturer to then install the technology into their devices. In its own small way, this innovation is just as striking as Henry Ford’s assembly line—it has equally important implications for those involved in this industry.

Such a breakthrough has led InvenSense in a whole new direction. Whereas before their work was focused on the computing side of delicate electronics manufacturing, now they are getting more involved in the nuts and bolts of the operation so as to upgrade their production efficiency.

Company leaders have transferred much of their production energy to a high-output MEMS foundry that can create thousands of MEMS gyroscope sensors alongside other essential consumer electronics devices, all on the surface of a single 6-inch silicon wafer.

Their research and development teams are hard at work on continually shrinking the size of this wafer as well as integrating applications and functions performed by electronics hardware so that every day one device can be used to do the work of two, thereby taking up less space on the chip and reducing the eventual size of the end product. And as we all know, if there’s anything consumers typically want out of their handheld electronics, it tends to be a consistently smaller and sleeker design that still delivers an increase in functionality.

What does this mean for the typical consumer? If you are at all familiar with the Nintendo Wii gaming system, you can expect to be equally shocked by the coming upgrade to systems like that one. People were surprised and overjoyed to find a new level of movement in the Wii controller, but the fact remains that the Wii still has its limitations and has left much room for improvement.

By Christmas 2009 it is anticipated that gaming systems and similar electronics will be completely controller-free, so that the player will have to do nothing more than stand in front of their television and move their body to play a video game. And of course as the technology improves, players will be able to move farther and farther away from the gaming device and still have a superior level of control. Researchers expect to incorporate voice and gesture recognition into a variety of consumer devices from recreational to business functions; they are also working to integrate various technologies so that eventually one portable device will do the work of many.

Wait a few years and you may find that the same machine that acts as your laptop is also your iPod, Palm Pilot, Nintendo gaming system, phone, and car stereo rolled into one. With MEMS technology on the rise, anything is possible.

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MEMS technology allows for the construction of high-tech items like extremely tiny sensor chips whose electronics are built-in rather than adhered separately; such chips had been produced before, but at a far greater cost and a far larger size. The newer MEMS chips are both tiny and more cost-effective.

Scientists and R&D researchers have found virtually endless possibilities for this technology, since it can be used to actuate all kinds of delicate electronics. Some commercial MEMS products that have already been developed and released for public consumption include:

• MEMS accelerator chips that can sense when a vehicle has been in a collision, determine how severe the accident was, and deploy the vehicle’s airbags at a speed and size that correlate with this information. “Smart” airbags could save lives, since both too little and too many airbags have been known to cause death in accident situations.
• MEMS mirror chips that are manufactured into projection screen TV’s. This new type of television technology has the potential to revolutionize the way we view visual media, as well as boost market profits considerably for all associated sectors of the economy.
• MEMS inkjet nozzles. These high-tech printer components not only consume far less power than traditional nozzles, making them more cost-effective, but they also are the industry’s fastest. With these nozzles in place, printers can achieve speeds of 15 lines a second when printing onto rolled paper and three pages a minute when using loose sheets.
• Medical MEMS pressure sensors. These ultra-sensitive pressure readers can be used for a wide variety of medical procedures, but one of them has been the development of a more effective and less bulky pacemaker.

Since MEMS is such a relatively new technological discovery, the bulk of its applications are still being discovered, with more ideas being born every day. Here are some MEMS products currently in the developmental stage:

• A computer game controller that uses MEMS technology. Video game companies are hoping that they can use MEMS to enhance the gaming experience. In much the same way that the Nintendo Wii controllers made all previous controllers obsolete with their motion-sensing technology, the new controllers will be even more hands-free and body-motion sensing.
• A MEMS gyroscope that can be programmed to incorporate customized features so that gyroscopes can be integrated with industrial equipment in a more cost-effective manner. By using only the functions that they need, companies can reduce their gyroscope-related operational costs significantly.
• Microphones that use MEMS technology in order to function. These microphones are not only smaller and more effective than traditional microphones, they are also more cost-effective to produce and longer-lasting. They are even more heat-resistant than conventional models, so that using them for a long time isn’t a problem because they won’t get overheated or develop heat-related issues.
• MEMS RF switches. These devices are part of what makes your microwave function, and when upgraded with MEMS technology they can render microwaves more cost-efficient and energy-efficient by reducing power loss in microwave applications.
• MEMS Blood pressure device. This super-powered sensor can read every little detail about your blood pressure, and best of all it can be implanted in patients to provide constant, 24-hour surveillance. This is especially useful for those in critical condition who require such delicate care. The MEMS device has strong wireless information transfer capabilities, which is what allows it to be directly implanted in the patient’s body in the first place.
• MEMS oscillators. Currently, most people in the industry use quartz oscillators. The MEMS version of this device is not only smaller and more effective, but also can integrate better with the electronics circuits that oscillators typically interact with.

MEMS technology has also revolutionized the way that electronics are manufactured. It is especially well suited for techniques like bulk micromachining, where micro-mechanical structures using nothing but the thickness of a wafer of silicon. Micro-process etching is used to machine the silicon chip, after which glass plates or other chips are added using anodic bonding. MEMS can also be used in surface micromachining and high aspect ratio, or HAR micromachining.

Every up-and-coming business in the technological industry has a strong MEMs research and development program. Large firms tend to specialize in high volume small parts manufacturing or creating packaged solutions for what are known as “end markets,” which include the biomedical industry, automobiles, and electronics. Smaller firms offer innovative solutions and generate high profit margins through sales in order to pay for the custom manufacturing. But no matter their size, all firms provide intensive research and development to explore the further commercial possibilities of MEMS products.

R&D is perhaps the most lucrative area associated with MEMS to date, since most of its applications have yet to be discovered. Engineering software has been developed that allows MEMS researchers to take products from concept to completion and also provides prototyping and testing applications along the way. MEMS design often employs what is known as finite element analysis. Some software programs even allow researchers to test the potential effects of heat, dynamics, and electrical connections on their particular MEMS product. Once prototypes have been developed, they can be put through their paces using tools such as microscopes, stroboscopes, and laser Doppler scanning vibrometers.

All of this work pays off in the market. It is estimated that the global micro-electromechanical systems industry, whose mainstays tend to be airbag systems, inkjet cartridges and display systems, raked in a total of $40 billion in 2006 alone. By 2008 this figure had skyrocketed to $6.9 billion, and numbers continue to rise. Contrast this with the $1 billion in total production costs expended by the MEMS manufacturers, and you have staggering profit margins in the lucrative new MEMS commercial arena.

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Knowing how fast a vehicle accelerates allows for classifications according to mile time, and lead to attractive descriptions of how quickly a vehicle can accelerate from 0 to 60 mph. What people may not realize about accelerometers is that they can also be used to measure the rate of vibration not only on cars but also buildings, machines, safety installations, and process control systems.

It naturally follows that accelerometers can also be used to detect seismic activity, angles of inclination, and dynamic distance as well as speed. There is also a special sub-category of accelerometers that can actually measure the force of gravity; these devices are known as gravimeters.

Scientists have now refined accelerometer design and sensitivity to the point where small accelerometers can actually be attached to notebooks. These notebooks are then used at earthquake sites to provide both quake measurements as well as a place to immediately write down pertinent information that the accelerometer may reveal while researchers are visiting the quake site.

Surprisingly enough, delicate accelerometers can also be used to track animals. By measuring wavelength frequencies and muscle acceleration, among other things, researchers are able to keep track of an animal’s behavioral patterns even when that animal may be out of sight.

And by using an accelerometer to determine the frequency of the animal’s limb strokes or using accelerometer data to measure their Overall Dynamic Body Acceleration, animal scientists are equally able to discover how much energy an animal uses in the wild and how quickly they expend that energy. These qualities have made accelerators very popular with marine biologists and others who study water animals, since their subjects will usually be hidden from view for the majority of their research.

There are medical applications for accelerometers as well. Many walkers and runners now enjoy a specialized type of pedometer that employs accelerometer technology in order to calculate speed and distance. They have also been used in emergency situations to determine the number and depth of chest compressions during CPR.

Other fields that regularly employ accelerometers include navigation, transportation, consumer electronics, and structural integrity which feed into construction, architecture, and other building-related trades. In short, wherever a measurement of vibrations, pressure, energy expenditure, or of course acceleration is useful, an accelerometer is key.

MEMS accelerometers use nanotechnology in order to enhance the natural abilities common between all accelerators; hence, these devices are extremely fine-tuned and accurate. MEMS stands for Micro Electro Mechanical Systems, and when discussing the technicalities of accelerometers it refers specifically to a mass-displacer that can translate external forces such as gravity into kinetic motion energy. This part of the accelerometer usually contains some type of spring force in order to balance the external pressure and displace its mass, thus leading to the motion that produces acceleration.

MEMS accelerometers are actually the simplest type, since they consist of little more than a seismic mass, also known as a proof mass, as well as a cantilever beam. Oftentimes residual gas becomes sealed inside the device, which can cause damping over time but is usually not too severe unless the Q-factor is too low. In this case the damping process can cause a loss of sensitivity.

The mechanism works like this: external force is applied and shifts the position of the proof mass from a neutral position to an active position; typically the amount of this deflection is measured by analog or digital readouts. The variations can be charted by using a set of beams that are fixed in place contrasting with a set of beams that have been attached to the surface of the proof mass somehow. Such a simple system makes the accelerometer not only reliable but also relatively inexpensive to manufacture.

In some cases there have been questions about the accuracy of the spring inside the mechanism, since it is known that spring devices can warp or deteriorate over time; in this case it is possible to apply a series of piezoresistors to the springs to detect any deformities and ensure their accuracy. If these additional parts are inserted, the manufacturing process becomes somewhat longer and more complicated and the device becomes slightly pricier. Top-notch MEMS accelerators are built with quantum tunneling in order to achieve the highest sensitivity possible. These accelerators are accurate enough that they can be measured optically and despite their high cost are the ideal laboratory equipment.

Less commonly, a MEMS accelerator may have a small heater inside the base of a dome-shaped structure which heats the air inside and causes it to rise. The dome is equipped with a thermocouple to mark where the heated air hits the dome’s upper shell, and by measuring how far off-center the air is, the level of deflection can be ascertained. This deflection measurement is the amount of acceleration that has been applied to the sensor. However, this type of accelerator is generally considered far inferior to the previous model.

Most accelerometers function on one axis, but two-axis and three-axis models have been invented. The three-axis model is naturally more expensive but also far more accurate; if this model isn’t used then three one-axis accelerometers will typically be combined after construction, with far less accurate results. There is also a direct relationship between the number of g’s that can be measured and the accuracy and sensitivity of the device. Usually the higher the device can measure, the more the accuracy suffers.

Nanotechnology has already enhanced many industrial areas, and now its effects can be seen in devices as specialized as the accelerometer. One of the crucial uses for MEMS accelerometers in particular has been airbag deployment systems; they literally save lives because they are able to judge when two cars have struck each other and even ascertain the severity of the collision, adjusting airbag size and rate of deployment accordingly.

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Essentially, this nanotechnology-derivative allows the “brains” and the “arms and legs” of an operating system to be put onto one small silicon microchip, whereas prior the development of MEMS they were two separate systems that had to be integrated.

Not only does the new one-chip combination allow for streamlined efficiency, it also means lower production costs and more reliability.

Additionally, it has made possible a whole new set of “smart” products that can use the MEMS chip to bridge gaps between various disciplines.

This amazing synergy is nowhere more evident than in the medical field. In some cases MEMS has been used to enhance previously-existing devices, such as scalpels. Many surgical tools have been equipped with “smart” technology to give them a more delicate touch when dealing with the human body.

MEMS is perfect for this application because it is an offshoot of nanotechnology and its extremely small size makes it capable of both large-scale and microscopic control.

No matter how highly trained a surgeon is, he or she is still operating on the macro-scale, and the human body functions largely on the micro-scale. Especially when it comes to delicate operations such as removing a tumor, MEMS technology can help to remove cancerous tissue right down to the last molecule so that there is no chance of re-growth.

In the MEMS scalpel, for example, scientists put the sensor chip as close to the edge of the blade as possible. Not only does this allow doctors and surgeons to have extremely delicate control over their tools, but it also improves the possible level of control so much that scientists anticipate new surgical procedures developing around MEMS technology.

To make any type of surgery go more smoothly, these superior sensors can read and relay information about the surgery being performed so that surgeons have information about the area in which they are cutting as well as data that shows how their surgery is progressing.

In some situations it can be difficult to see clearly what is going on inside the human body, but MEMS scalpels could provide mapping technology to guide surgeons more clearly.

They could also protect the patient from mistakes; some companies have even equipped MEMS scalpels with the ability to shut themselves off if the blade wanders too close to a vein.  Needles and drills could provide similar levels of control and information so that in the future, surgery will be much more reliable, accurate, and safe than it has traditionally been.

MEMS technology also leads to greater safety for automobile drivers. With their super-powerful sensors, MEMS accelerometers can sense when a vehicle has been in an impact; they can even judge the speed and severity of the crash in order to deploy airbags at the right speed and volume.

This is important because in many cases, airbags that deploy either too quickly or too slowly can cause death. Manufacturers will be able to save lives by implementing this smart technology.

These same accelerometers can be adapted in surprising ways; you may have heard of a little thing called the iPhone, which actually uses extensive MEMS technology for many of its applications. Sensitive MEMS accelerometers can be scaled down and incorporated into handheld devices like mobile phones.

They allow the phone to sense which way it is being turned and shift the screen from a portrait layout to a landscape layout, for example. They are also responsible for much of the hype about iPhone games, which use gimmicks like shaking the phone in order to roll dice.

Cell phone MEMS devices can also be integrated with an electronic compass in order to provide the GPS positioning system that iPhones offer. Because of MEMS’ tiny size and versatility this technology can produce everything a consumer could ever want in a phone; already it has led to cell phone microphones, autofocus actuators, BAW filters and duplexers, projectors, inclinometers, pressure sensors, and pico-projectors.

It’s hard to imagine what else could possibly be crammed into one small phone, yet researchers are constantly finding more ways to pack MEMS applications into cell phones while at the same time making those phones smaller and smaller.

This shows a rising trend in petite, sophisticated electronics manufacturers who want MEMS accelerometers and other high-tech devices for their products. With the touch-based system that MEMS makes possible and that millions of consumers have now experienced through the iPhone, this kind of performance is expected from newer phones.

Thanks to Apple’s success story, Sony Ericsson, Nokia, Samsung and LG have all realized the importance of the MEMS device and each manufacturer has released several new models that make use of this new technology.

MEMS chips are great for the “wow” factor of a phone because they make handheld devices seem “smart,” allowing the user to interact completely with his or her phone or palm pilot. In 2008, only 10% of cell phones had MEMS capabilities.

Now, in 2009, that number has risen to 20%, or in other words one out of every five phones; analysts anticipate that by 2010 no less than one out of every three phones will incorporate MEMS “smart” technology as an integral part of its design. If MEMS technology catches on faster, however, this number could rise until virtually every phone or handheld device will have to include MEMS technology in order to be competitive.

All this burgeoning development leads to big profits for those involved in MEMS research and production. It is anticipated that MEMS, along with its sister field of nanotechnology, will provide more jobs than possibly any other area in the next 10 to 15 years.

Nanotech has the potential to revolutionize the economy; it promises big money in research, production, and marketing. Advertising specialists expect that the mobile phone market alone will reach $1.6 billion in pure sales by 2013. This makes nanotechnology and its MEMS offshoot the safest bet for investors and industry workers in the near future.

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This unique system combines sensors, actuators, mechanical components, and electronics on one silicon base; essentially it is a type of glorified computer chip.

Typically, microfabrication is used to apply the various elements to their silicon wafer.

The many components that go on the wafer all have their different manufacturing processes: electronics are typically made separately using integrated circuit, or IC, process sequences (this can include BICMOS, CMOS, or Bipolar techniques.) The micromechanical elements, on the other hand, are often micromachined.

This means that a high-tech device, sometimes a laser cutter, etches away parts of the silicon chip, or sometimes areas are added in order to create the end result.With the advent of MEMS technology, the techno-geek dream of having an entire system on one chip has become reality.

Prior to MEMS, two separate components were required to work in tandem: the microelectronics on a silicon chip, and the micromachined mechanical elements in a different format. Combining them into one efficient MEMS system eliminates several steps of production as well as the need for a connector between the two elements.

This allows for the development of “smart” products because microelectronics can perform delicate computational functions which are then enacted by the fine-tuned physical accuracy of microsensors and microactuators. Smart MEMS products with these kinds of capabilities open up a whole new world of applications and technological design possibilities.

Understanding what the different parts of a MEMS chip are all about becomes easy when you think of the microelectronic integrated circuits as the brains of the operation, sending signals to the microsystems that will then act as eyes, arms, legs, etc. to carry out the desired action.

Once the microsensors have received the circuits’ directions they sense their environment, measuring different factors such as thermal readings, biological presence, mechanical functions, chemicals, optical information, and magnetics—this information is then relayed back to the “brain” for more decision-making, and all of these steps take place in a matter of seconds.

The fact that MEMS microchips can to some degree make their own decisions fits in with other innovations in the field of nanotechnology; nanotech scientists have always made it plain that they are working toward an ideal autonomous product (which will perhaps reach its peak expression in the nanorobot, but is nevertheless an integral part of most nanotechnology products.)

Decision-making capabilities as well as sensors that allow the MEMS chip to detect its environment are key factors in its superior functioning. The actuators usually perform functions like physically moving their entity, positioning in small increments, regulating data, pumping fluids or air, and filtering various substances.

Typically the functions associated with a device that uses MEMS technology are somehow related to controlling the surrounding environment in order to achieve a desired outcome. Before MEMS technology other devices were capable of doing similar tasks, but to date none has been as efficient as MEMS.

This is because MEMS chips can typically be made using batch fabrication manufacturing in much the same way that integrated circuits are produced, which renders them extremely low in cost as well as more functional, more reliable, and also more sophisticated. And perhaps the best part is that all of these superior features can be combined onto one small silicon chip.

Almost every industry can benefit from having such fine-tuned technology at their disposal. The dual nature of MEMS systems allow them to bridge gaps between previously unassociated subjects, such as microelectronics and biology, for example.

Biotechnology has benefited from MEMS developments like the Polymerase Chain Reaction microsystems which can be used to amplify and identify DNA. MEMS has also given rise to Scanning Tunneling Microscopes, which are made with the micromachining process; biochips that have the ability to scan and detect chemical and biological agents which may be hazardous; and microsystems that render drug screening and selection more effective.

In the communications field, high frequency circuits have been upgraded with MEMS technology so that they can perform better and more cost-efficiently. Electrical elements of these circuits tend to benefit the most, such as their tunable capacitors and their inductors—and best of all, production and installation become a simplified process because no integration is required when MEMS is used.

The mechanical switches used to run these systems also show large improvements when upgraded with MEMS. The only drawback for MEMS communications devices lies in their reliability and packaging; in some cases the same product has had consistency issues across the board and resolving these problems will prompt greater acceptance in the marketplace.

Accelerometers are used for a variety of scientific applications, and MEMS can improve these functions too. MEMS accelerometers are quickly rendering their conventional counterparts obsolete, especially when it comes to airbag deployment in automobiles.

MEMS accelerometers can sense not only the fact that an impact has occurred, but they can also judge the speed, intensity, and several other crash-related factors in order to determine the rate at which an airbag system should deploy and also how much of the airbag to release.

This has the potential to save lives, since too much or too little airbag has often resulted in crash deaths. The traditional accelerometer is actually a series of devices integrated together at various points throughout the vehicle, with their attendant electronics positioned near the airbag.

This system is not only clunky and awkward, but allows the system parts to become cut off from each other at several points, possibly resulting in complete lack of accuracy or even a total system malfunction.

This conventional accelerometer package typically costs about $50 per vehicle. MEMS nanotech accelerometers, on the other hand, can integrate all the fundamental parts onto one small silicon chip. Such an approach renders them lighter, more accurate, and less expensive—MEMS accelerometers tend to average about $5 or $10 per vehicle, saving the consumer money many times over.

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